1 20235 23 23 7 23 3 31 A 107 DRAM 128 NAND 16/14nm18nm LamResearchKLA 3 11 1 3 1 623 4 193nm � 0.25 𝑁� 45 �=�� 0.25 𝑘1 38nm 1𝑁� 23 ASML NikonArFi 2022 273.5 25.4% 7 VLSIResearch2021Top10TEL2021169.3 3Advantest6DNS TEL FY23CY22.4-CY23.3 2022 186.8 58.9 31.5% 60%55.2% 31.1%30% A J - / - -CMP - CVD-CVD--CVD/ALD ifind ifind ifind ifind ifind ifind ifind ifind ifind